2024 SMB Exhibitions
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Our PRIME MOVER™ actuator is a unique linear actuator that provides superior reliability and maintenance-free performance.
This type of actuator is popular with semiconductor and vacuum equipment manufacturers due to its superior reliability, contamination-free operation, compact design and maintenance-free operation.
PRIME MOVER™ uses a welded metal bellows (essentially a hermetic spring) as the force generating mechanism instead of a traditional piston. As a pressure differential is applied across the bellows, it compresses or extends. If external pressure is applied, the bellows compresses, extending the actuator. If pressure is removed, the bellows spring force retracts the actuator. Double actuating versions are also available.
An existing pneumatic actuator was repurposed by a major producer of semiconductor equipment for a new application. The existing actuator performed sub-optimally in the new application due to lower forces, higher operational life requirements, and more aggressive processing chemistries.
Read Case StudyThe legacy design for a thermal actuator relied upon an elastomer-encased wax medium. Unfortunately operating temperature extremes rapidly degraded the elastomer, resulting in a very high rate of failure for this device.
Read Case StudyOur customer was looking to improve the performance of their wafer handling system. Their historical approach involved the use of an air cylinder and a welded metal bellows to seal the penetration into the vacuum chamber.
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